Growth of Y3Fe5O12 films on Si with AlO x and SiO2 buffer layers by ion beam sputtering

标题
Growth of Y3Fe5O12 films on Si with AlO x and SiO2 buffer layers by ion beam sputtering
作者
关键词
garnet ferrite films, semiconductor substrate, buffer layer, polycrystalline structure, cross section, ferromagnetic resonance
出版物
INORGANIC MATERIALS
Volume 53, Issue 10, Pages 1069-1074
出版商
Pleiades Publishing Ltd
发表日期
2017-09-13
DOI
10.1134/s0020168517100156

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