Speciation of CuCl and CuCl2 Thiol-Amine Solutions and Characterization of Resulting Films: Implications for Semiconductor Device Fabrication

标题
Speciation of CuCl and CuCl2 Thiol-Amine Solutions and Characterization of Resulting Films: Implications for Semiconductor Device Fabrication
作者
关键词
-
出版物
INORGANIC CHEMISTRY
Volume 56, Issue 23, Pages 14396-14407
出版商
American Chemical Society (ACS)
发表日期
2017-11-14
DOI
10.1021/acs.inorgchem.7b01359

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