期刊
IEEE SENSORS JOURNAL
卷 17, 期 3, 页码 644-649出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2016.2615059
关键词
Relative humidity (RH) sensor; microfiber interferometer; evanescent-field; temperature cross-sensitivity
资金
- National Natural Science Foundation of China [61327012, 61275088]
- Research Foundation of Education Bureau of Shaanxi Province, China [14JS073]
- Graduate Student Innovation Fund of Xi'an Shiyou University [2015cx140837]
A simple and sensitive optical fiber relative humidity (RH) sensor is proposed and demonstrated in this paper. The optical microfiber inter-mode interferometer is fabricated by tapering PM-elliptical core fiber down to micrometer scale in diameter, the coupling mainly occurs between the LP01 and LP11 modes. The microfiber interferometer (MFI) is fixed as U-shape, making it conveniently to measure. The RH changes are determined from the wavelength shift of the interference pattern induced by the evanescent-field interaction. Experimental results show that MFI with a thinner diameter of 4.7 mu m offers the best RH sensitivity of 114.7 pm/RHU (per relative humidity unit) ranging from 30% to 90% and good linearity between wavelength and RH. The temperature response has also been experimentally studied, and the temperature sensitivity is 7.6 pm/degrees C from 30 degrees C to 90 degrees C, which indicates that this microfiber device possesses a low temperature cross sensitivity. The proposed RH sensor does not need any functional coating, with advantages of compact size and simple fabrication procedure, which make it attractive for several applications.
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