Ultra-High Sensitivity Humidity Sensor Based on MoS2/Ag Composite Films

Novel capacitance-type humidity sensors based on MoS2/Ag composite films with a simple preparation method were proposed. The sensing characteristics of sensors against relativehumiditywere investigated, and the test results demonstrated that the humidity sensitivity of the MoS2/Ag-based sensorswas significantly Enhanced, which is ten times that of the pure MoS2-based humidity sensors. Meanwhile, this kind of sensors exhibited fast response speed capable of detecting the human breath. Furthermore, complex impedance spectroscopywas discussed to understand the sensingmechanisms of MoS2/Ag-based sensors.