Predictive modeling of feature dimension for tip-based nano machining process

出版年份 2016 全文链接

标题

作者

关键词

Nanofabrication, Tip-based nano machining, Modeling of feature dimension

出版物

Volume 24, Issue -, Pages 338-345

出版商

Elsevier BV

发表日期

2016-07-16

DOI

10.1016/j.jmapro.2016.06.013

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