期刊
2D MATERIALS
卷 4, 期 1, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/2053-1583/4/1/011010
关键词
graphene; functionalization; humidity sensor; graphene devices
资金
- EU FP7 project CareRAMM
- European Union [309980]
- EPSRC [EP/K017160/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/K017160/1, 1341106] Funding Source: researchfish
We report a novel approach for the fabrication of micro-and nano-scale graphene devices via the in situ plasma functionalization and in situ lithographic patterning of large-area graphene directly on CVD catalytic metal (Cu) substrates. This enables us to create graphene-based devices in their entirety prior to any transfer processes, simplifying very significantly the device fabrication process and potentially opening up the route to the use of a wider range of target substrates. We demonstrate the capabilities of our technique via the fabrication of a flexible, transparent, graphene/graphene oxide humidity sensor that outperforms a conventional commercial sensor.
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