Growth, structural and mechanical properties of magnetron-sputtered ZrN/SiN x nanolaminated coatings

标题
Growth, structural and mechanical properties of magnetron-sputtered ZrN/SiN x nanolaminated coatings
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 308, Issue -, Pages 158-167
出版商
Elsevier BV
发表日期
2016-08-15
DOI
10.1016/j.surfcoat.2016.06.099

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