The effects of substrate temperature on properties of B and Ga co-doped ZnO thin films grown by RF magnetron sputtering

标题
The effects of substrate temperature on properties of B and Ga co-doped ZnO thin films grown by RF magnetron sputtering
作者
关键词
B and Ga co-doped ZnO, Sputtering, Substrate temperature
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 307, Issue -, Pages 1129-1133
出版商
Elsevier BV
发表日期
2016-03-05
DOI
10.1016/j.surfcoat.2016.03.004

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