Ultra-sensitive NO 2 sensor based on vertically aligned SnO 2 nanorods deposited by DC reactive magnetron sputtering with glancing angle deposition technique
Ultra-sensitive NO 2 sensor based on vertically aligned SnO 2 nanorods deposited by DC reactive magnetron sputtering with glancing angle deposition technique
作者
关键词
SnO, 2, nanorods, Glancing-angle deposition, NO, 2, sensor, Sputtering
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