Capacitive humidity sensitivity of SnO 2 :Sn thin film grown on silicon nanoporous pillar array

出版年份 2016 全文链接

标题

作者

关键词

SnO, 2, :Sn composite thin film, Silicon nanoporous pillar array (Si-NPA), Capacitive humidity sensor, Chemical vapor deposition

出版物

Volume 229, Issue -, Pages 513-519

出版商

Elsevier BV

发表日期

2016-02-09

DOI

10.1016/j.snb.2016.02.025

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