Micro catalytic methane sensors based on 3D quartz structures with cone-shaped cavities etched by high-resolution abrasive sand blasting

出版年份 2016 全文链接

标题

作者

关键词

Methane sensor, MEMS, Quartz, Abrasive sand blasting

出版物

Volume 242, Issue -, Pages 9-17

出版商

Elsevier BV

发表日期

2016-02-13

DOI

10.1016/j.sna.2016.02.017

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