Design, fabrication and characterization of thin film resistances for heat flux sensing application

标题
Design, fabrication and characterization of thin film resistances for heat flux sensing application
作者
关键词
Heat flux sensor, MEMS, Platinum RTD, Self-heating, TCR, Uncertainties
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 245, Issue -, Pages 26-39
出版商
Elsevier BV
发表日期
2016-04-22
DOI
10.1016/j.sna.2016.04.040

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