MEMS microphones with narrow sensitivity distribution

标题
MEMS microphones with narrow sensitivity distribution
作者
关键词
MEMS, Microphone, OTP, Programming, High SNR, Sensitivity, Distribution
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 247, Issue -, Pages 663-670
出版商
Elsevier BV
发表日期
2016-05-08
DOI
10.1016/j.sna.2016.04.051

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