Chemically assisted ion beam etching of laser diode facets on nonpolar and semipolar orientations of GaN

出版年份 2016 全文链接

标题

Chemically assisted ion beam etching of laser diode facets on nonpolar and semipolar orientations of GaN

作者

关键词

-

出版物

SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Volume 31, Issue 7, Pages 075008

出版商

IOP Publishing

发表日期

2016-06-13

DOI

10.1088/0268-1242/31/7/075008

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