Principles of precursor design for vapour deposition methods

标题
Principles of precursor design for vapour deposition methods
作者
关键词
Atomic layer deposition, Chemical vapour deposition, Precursor design, Thermogravimetric analysis, Synthesis
出版物
POLYHEDRON
Volume 108, Issue -, Pages 59-66
出版商
Elsevier BV
发表日期
2015-09-03
DOI
10.1016/j.poly.2015.08.024

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