期刊
PHYSICS OF PLASMAS
卷 23, 期 8, 页码 -出版社
AIP Publishing
DOI: 10.1063/1.4961238
关键词
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资金
- National Natural Science Foundation of China [61205093]
- Fundamental Research Funds for the Central Universities [HIT.MKSTISP.2016 11]
- National Key Basic Research Program of China [2014CB340203]
This paper reports a novel coaxial gridded hollow discharge during operation at low pressure (20 Pa-80 Pa) in an argon atmosphere. A homogeneous hollow discharge was observed under different conditions, and the excitation mechanism and the discharge parameters for the hollow cathode plasma were examined at length. An optical emission spectrometry (OES) method, with a special focus on absolute continuum intensity method, was employed to measure the plasma parameters. The Langmuir probe measurement (LPM) was used to verify the OES results. Both provided electron density values (ne) in the order of 10(16) m(-3) for different plasma settings. Taken together, the results show that the OES method is an effective approach to diagnosing the similar plasma, especially when the LPM is hardly operated. Published by AIP Publishing.
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