Chemical vapor deposition of MoS2 layers from Mo–S–C–O–H system: thermodynamic modeling and validation
出版年份 2016 全文链接
标题
Chemical vapor deposition of MoS2 layers from Mo–S–C–O–H system: thermodynamic modeling and validation
作者
关键词
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出版物
PHYSICAL CHEMISTRY CHEMICAL PHYSICS
Volume 18, Issue 22, Pages 14918-14926
出版商
Royal Society of Chemistry (RSC)
发表日期
2016-05-05
DOI
10.1039/c6cp01617k
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