期刊
OPTICS LETTERS
卷 41, 期 17, 页码 3996-3999出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.41.003996
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资金
- Villum Fonden (Centre of Excellence: NATEC)
- Teknologi og Produktion, Det Frie Forskningsrad [FTP 11-117031]
- Villum Fonden [00008692] Funding Source: researchfish
AlGaAs is a promising material for integrated nonlinear photonics due to its intrinsic high nonlinearity. However, the challenging fabrication of deep etched AlGaAs devices makes it difficult to realize high-performance devices such as low-loss dispersion engineered waveguides and high-quality microring resonators. Here, we report a process to make high-quality AlGaAs-on-insulator (AlGaAsOI) wafers where high confinement waveguides can be realized. Using optimized patterning processes, we fabricated AlGaAsOI waveguides with propagation losses as low as 1 dB/cm and microring resonators with quality factors up to 350,000 at telecom wavelengths. Our demonstration opens new prospects for AlGaAs devices in integrated nonlinear photonics. (C) 2016 Optical Society of America
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