期刊
OPTICS COMMUNICATIONS
卷 362, 期 -, 页码 69-72出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.optcom.2015.08.039
关键词
Femtosecond laser direct writing; Two-photon polymerization; Fresnel zone plate array; Large-scale structuring
类别
资金
- National Basic Research Program of China [2011CB013000, 2014CB921302]
- National Natural Science Foundation of China (NSFC) [61137001, 91423102, 91323301]
- NECT [12-0235]
We report on the fabrication of large-scale eight-level phase-type Fresnel zone plate arrays (FZPAs) by femtosecond-laser direct writing technology. A high-speed galvanometer scanning system was used to fabricate each Fresnel zone plate to realize high fabrication efficiency. To overcome the limited fabrication scale in the case of galvanometer scanning, inter-plate movements were controlled by multi-axis air bearing precise positioning stages. With the system, FZPAs whose fill-factor was designed to be 100% realized a diffraction efficiency of 89%. The focusing and imaging properties of the FZPAs were also evaluated, and the FZPAs showed high fidelity. (C) 2015 Published by Elsevier B.V.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据