Atomic Layer Deposition of Gold Metal

标题
Atomic Layer Deposition of Gold Metal
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 28, Issue 1, Pages 44-46
出版商
American Chemical Society (ACS)
发表日期
2015-12-29
DOI
10.1021/acs.chemmater.5b04562

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