Intercomparison of ion beam analysis software for the simulation of backscattering spectra from two-dimensional structures

出版年份 2016 全文链接

标题

作者

关键词

Ion beam analysis, Computer simulation

出版物

Volume 385, Issue -, Pages 65-73

出版商

Elsevier BV

发表日期

2016-09-13

DOI

10.1016/j.nimb.2016.08.010

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