期刊
APPLICATIONS IN ENERGY AND COMBUSTION SCIENCE
卷 15, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.jaecs.2023.100195
关键词
Gas-phase synthesis; Pilot scale; Plasma; Silicon
This paper demonstrates the scalability of a gas-phase reaction method for producing crystalline silicon nanoparticles using a microwave-assisted plasma reactor. The study shows that the process technology can be successfully scaled up from laboratory scale to pilot plant scale while maintaining consistent particle characteristics. The production of spherical crystalline silicon particles with a high production rate is achieved, and the stability of the synthesis process is monitored.
The formation of crystalline silicon nanoparticles by homogeneous gas-phase reactions as a direct way to produce high-purity raw material is applied. For this purpose, a microwave-assisted plasma reactor is used. Goal of this paper is to show the scalability of our process technology from laboratory scale to pilot plant scale while maintaining the particle characteristics. This is demonstrated by producing and analyzing silicon nanoparticles during long-term synthesis in a pilot-scale microwave plasma reactor over a period of six hours. The focus is on a high production rate in conjunction with consistent particle characteristics. A continuous production of the mostly spherical crystalline silicon particles with a count median diameter (CMD) of 23.4 nm and a geometric standard deviation of 1.5 is shown using TEM analysis. The stability of the synthesis process is monitored by means of regular sampling and analyzing batch samples extracted from the process every 30 min. Here it is shown that the CMD varies statistically between 21 and 26 nm. Moreover, the decomposition rate of the pre-cursor was determined to be 99%, while the energy supply remained constant. A constant production rate of about 200 g center dot h-1 is shown.
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