Fabrication of silicon nanowire arrays by near-field laser ablation and metal-assisted chemical etching

标题
Fabrication of silicon nanowire arrays by near-field laser ablation and metal-assisted chemical etching
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 27, Issue 7, Pages 075301
出版商
IOP Publishing
发表日期
2016-01-18
DOI
10.1088/0957-4484/27/7/075301

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