Designs and processes toward high-aspect-ratio nanostructures at the deep nanoscale: unconventional nanolithography and its applications

标题
Designs and processes toward high-aspect-ratio nanostructures at the deep nanoscale: unconventional nanolithography and its applications
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 27, Issue 47, Pages 474001
出版商
IOP Publishing
发表日期
2016-10-24
DOI
10.1088/0957-4484/27/47/474001

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