Mask-less deposition of Au–SnO2nanocomposites on CMOS MEMS platform for ethanol detection

标题
Mask-less deposition of Au–SnO2nanocomposites on CMOS MEMS platform for ethanol detection
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 27, Issue 12, Pages 125502
出版商
IOP Publishing
发表日期
2016-02-19
DOI
10.1088/0957-4484/27/12/125502

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