期刊
NANOSCALE RESEARCH LETTERS
卷 11, 期 -, 页码 -出版社
SPRINGEROPEN
DOI: 10.1186/s11671-016-1565-8
关键词
Built-in temperature sensor; Submicron thermometry; Nanostripe; Sensitivity; Thin-film
资金
- NSF of China [11374016, 91221202]
- MOST of China [2012CB932702]
Dozens of small dual-beam thin-film temperature sensors with a total width down to 430 nm were fabricated and tested. The sensors were all made from 90-nm-thick Pd thin films, where the width of the narrow stripes was 70-100 nm and that of the wide ones was 210-800 nm. Two different calibration methods showed consistent and repeatable sensitivities of 0.7-1.2 mu V/K for the sensors, confirming that the sensitivity mainly depended on the width configuration of each sensor. By integrating arrays of such sensors on a practical testing platformusing hybrid e-beam lithography and photolithography techniques, we demonstrated that these sensors were capable of detecting a weak surface temperature difference of 0.1-0.2 K at microscale, and they could be scaled up as built-in temperature sensors in many practical devices.
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