Graphene “microdrums” on a freestanding perforated thin membrane for high sensitivity MEMS pressure sensors
出版年份 2016 全文链接
标题
Graphene “microdrums” on a freestanding perforated thin membrane for high sensitivity MEMS pressure sensors
作者
关键词
-
出版物
Nanoscale
Volume 8, Issue 14, Pages 7663-7671
出版商
Royal Society of Chemistry (RSC)
发表日期
2016-03-11
DOI
10.1039/c5nr09274d
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