The fabrication of a self-aligned multi-waveguide-layer passive Si₃N₄/SiO₂ photonic integrated circuit for a 3-D optical phased array device

标题
The fabrication of a self-aligned multi-waveguide-layer passive Si₃N₄/SiO₂ photonic integrated circuit for a 3-D optical phased array device
作者
关键词
-
出版物
Optical Materials Express
Volume -, Issue -, Pages -
出版商
Optica Publishing Group
发表日期
2023-11-02
DOI
10.1364/ome.507523

向作者/读者发起求助以获取更多资源

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started