Investigation on the Mist intensity to deposit Gallium Oxide thin films by Mist Chemical Vapour Deposition (M‐CVD)

标题
Investigation on the Mist intensity to deposit Gallium Oxide thin films by Mist Chemical Vapour Deposition (M‐CVD)
作者
关键词
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出版物
出版商
Wiley
发表日期
2023-10-30
DOI
10.1002/pssr.202300296

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