Characteristics of ultrathin Indium Oxide Thin‐Film Transistors with Diverse Channel Lengths Fabricated by Atomic Layer Deposition

标题
Characteristics of ultrathin Indium Oxide Thin‐Film Transistors with Diverse Channel Lengths Fabricated by Atomic Layer Deposition
作者
关键词
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出版物
出版商
Wiley
发表日期
2023-11-04
DOI
10.1002/pssb.202300323

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