标题
A Defect-Based MEMS Phononic Crystal Slab Waveguide in Electronic Circuits
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 32, Issue 5, Pages 494-504
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2023-07-26
DOI
10.1109/jmems.2023.3296149
参考文献
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