标题
Study of AlN Growth Using AMEC Prismo HiT3 MOCVD Reactor
作者
关键词
-
出版物
JOURNAL OF CRYSTAL GROWTH
Volume -, Issue -, Pages 127463
出版商
Elsevier BV
发表日期
2023-10-25
DOI
10.1016/j.jcrysgro.2023.127463
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- High growth temperature for AlN by jet stream gas flow metalorganic vapor phase epitaxy
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