Frequency response of an electrostatically actuated micro resonator in contact with incompressible fluid
出版年份 2016 全文链接
标题
Frequency response of an electrostatically actuated micro resonator in contact with incompressible fluid
作者
关键词
Softening Behavior, Static Deflection, Floquet Multiplier, Modify Couple Stress Theory, Multiple Scale Method
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 23, Issue 7, Pages 2381-2391
出版商
Springer Nature
发表日期
2016-05-18
DOI
10.1007/s00542-016-2965-5
参考文献
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