Porosity and thickness characterization of porous Si and oxidized porous Si layers – An ultraviolet–visible–mid infrared ellipsometry study

标题
Porosity and thickness characterization of porous Si and oxidized porous Si layers – An ultraviolet–visible–mid infrared ellipsometry study
作者
关键词
Infrared ellipsometry, Electrochemical etching, Porous silicon layer, Oxidation, Measurement of porosity
出版物
MICROPOROUS AND MESOPOROUS MATERIALS
Volume 227, Issue -, Pages 112-120
出版商
Elsevier BV
发表日期
2016-02-25
DOI
10.1016/j.micromeso.2016.02.039

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