Micro-clamps for precise positioning of 120° silicon double mirrors in a MOEMS gyroscope

标题
Micro-clamps for precise positioning of 120° silicon double mirrors in a MOEMS gyroscope
作者
关键词
Silicon double mirror, Micro-clamps, MOEMS, Optical gyroscope
出版物
MICROELECTRONIC ENGINEERING
Volume 159, Issue -, Pages 27-31
出版商
Elsevier BV
发表日期
2016-02-20
DOI
10.1016/j.mee.2016.02.029

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