Low-cost top-down zinc oxide nanowire sensors through a highly transferable ion beam etching for healthcare applications

标题
Low-cost top-down zinc oxide nanowire sensors through a highly transferable ion beam etching for healthcare applications
作者
关键词
Ion beam etch, Nanowire, Zinc oxide, pH sensing, Biosensor
出版物
MICROELECTRONIC ENGINEERING
Volume 153, Issue -, Pages 96-100
出版商
Elsevier BV
发表日期
2016-02-20
DOI
10.1016/j.mee.2016.02.016

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