Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization

标题
Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization
作者
关键词
Diamond tip, Boron doped diamond, FDT, SSRM
出版物
MICROELECTRONIC ENGINEERING
Volume 159, Issue -, Pages 46-50
出版商
Elsevier BV
发表日期
2016-03-02
DOI
10.1016/j.mee.2016.02.053

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