Oxidized-Silicon-Terminated Diamond p-FETs With SiO2-Filling Shallow Trench Isolation Structures
出版年份 2023 全文链接
标题
Oxidized-Silicon-Terminated Diamond p-FETs With SiO2-Filling Shallow Trench Isolation Structures
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 44, Issue 11, Pages 1899-1902
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2023-09-27
DOI
10.1109/led.2023.3319574
参考文献
相关参考文献
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