Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition

标题
Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 2, Pages 021516
出版商
American Vacuum Society
发表日期
2016-02-09
DOI
10.1116/1.4941411

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