Detection of residual stress in Ba(Mg1/3Ta2/3)O3 thin films by nanoindentation technique

标题
Detection of residual stress in Ba(Mg1/3Ta2/3)O3 thin films by nanoindentation technique
作者
关键词
BMT thin films, Residual stress, Nanoindentation, Aqueous solution–gel method
出版物
CERAMICS INTERNATIONAL
Volume 41, Issue 9, Pages 11632-11636
出版商
Elsevier BV
发表日期
2015-06-05
DOI
10.1016/j.ceramint.2015.05.123

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