Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction

Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered one of the fastest-growing, interdisciplinary high technologies during the post-Moore era. Modern advancements within this arena include wearable electronics, Internet of Things, and artificial brain-inspired intelligence, among other modalities, thus bringing opportunities to drive MEMSbased gas sensors with higher performance, lower costs, and wider applicability. However, the high demand for miniature and micropower sensors with unified processes on a single chip imposes great challenges. This review focuses on recent developments and pitfalls in MEMS-based micro-and nanoscale gas sensors and details future trends. We also cover the background of the topic, seminal efforts, current applications and challenges, and opportunities for next-generation systems.

Automated summary

This review focuses on recent developments and challenges of MEMS-based micro-and nanoscale gas sensors, as well as future trends in this field. It also covers the background, seminal efforts, current applications, challenges, and opportunities for next-generation systems.