CO2laser polishing of microfluidic channels fabricated by femtosecond laser assisted carving

标题
CO2laser polishing of microfluidic channels fabricated by femtosecond laser assisted carving
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 26, Issue 11, Pages 115011
出版商
IOP Publishing
发表日期
2016-10-06
DOI
10.1088/0960-1317/26/11/115011

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