Characterization of a smartphone size haptic rendering system based on thin-film AlN actuators on glass substrates

标题
Characterization of a smartphone size haptic rendering system based on thin-film AlN actuators on glass substrates
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 26, Issue 8, Pages 084007
出版商
IOP Publishing
发表日期
2016-07-22
DOI
10.1088/0960-1317/26/8/084007

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