Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator
出版年份 2022 全文链接
标题
Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator
作者
关键词
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出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 32, Issue 10, Pages 105001
出版商
IOP Publishing
发表日期
2022-07-30
DOI
10.1088/1361-6439/ac855a
参考文献
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