Investigation of Different Metals as Ohmic Contacts to β-Ga2O3: Comparison and Analysis of Electrical Behavior, Morphology, and Other Physical Properties

标题
Investigation of Different Metals as Ohmic Contacts to β-Ga2O3: Comparison and Analysis of Electrical Behavior, Morphology, and Other Physical Properties
作者
关键词
Ohmic metal contacts, gallium oxide, wide bandgap, semiconductor, electrical behavior, morphology
出版物
JOURNAL OF ELECTRONIC MATERIALS
Volume 46, Issue 4, Pages 2053-2060
出版商
Springer Nature
发表日期
2016-11-29
DOI
10.1007/s11664-016-5121-1

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