期刊
SURFACE & COATINGS TECHNOLOGY
卷 441, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2022.128522
关键词
Cr; N coating; Microwave plasma chemical vapor deposition; Structural transformation; Mechanical properties
资金
- National Key R&D Program of China [2021YFB3802300]
- Guangdong Major Project of Basic and Applied Basic Research [2021B0301030001]
- Hanjiang Laboratory [HJL202012A001, HJL202012A002, HJL202012A003]
This study utilized the microwave plasma chemical vapor deposition technique to fabricate Cr-N coatings and systematically analyzed the influence of preparation temperature on the chemical composition, structure, and mechanical properties of the coatings. The results showed that higher preparation temperature led to a structural transformation of the coatings and an increase in hardness and elastic modulus. The optimal preparation temperature was found to be 800 degrees C, where the coating exhibited a dense surface and the best overall mechanical properties.
This study innovatively employed the microwave plasma chemical vapor deposition (MPCVD) technique to fabricate Cr-N coatings. The influence of preparation temperature on chemical composition, crystalline phase, morphology, and mechanical properties of the coatings were analyzed systematically. The increase of preparation temperature resulted in the structural transformation of the Cr-N coatings from the duplex of Cr2N/CrN to the single-phased Cr2N. The coatings with dense and flat surface were obtained at <= 800 degrees C; however, the decomposition of CrN to Cr2N and N2 led to the formation of pores at >= 850 degrees C and consequently an increase in friction coefficient and wear. The hardness and elastic modulus increased with increasing temperature because of the structural evolution of the Cr-N coating and phase transformation. 800 degrees C was the optimal preparation temperature as the coating exhibited a dense surface and possessed the best overall mechanical properties.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据