Thermal stress relaxation phenomenon through forming the interstitial region in CZ silicon pulled with rapid and slow cooling heat shields

标题
Thermal stress relaxation phenomenon through forming the interstitial region in CZ silicon pulled with rapid and slow cooling heat shields
作者
关键词
-
出版物
出版商
Elsevier BV
发表日期
2022-07-11
DOI
10.1016/j.pcrysgrow.2022.100579

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