N-Type Nanosheet FETs without Ground Plane Region for Process Simplification

标题
N-Type Nanosheet FETs without Ground Plane Region for Process Simplification
作者
关键词
-
出版物
Micromachines
Volume 13, Issue 3, Pages 432
出版商
MDPI AG
发表日期
2022-03-14
DOI
10.3390/mi13030432

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