4.6 Article

Synthesis of flat sticky hydrophobic carbon diamond-like films using atmospheric pressure Ar/CH4 dielectric barrier discharge

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JOURNAL OF APPLIED PHYSICS
卷 119, 期 22, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.4953684

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An Ar/CH4 atmospheric pressure dielectric barrier discharge (AP-DBD) was used to synthesize sticky hydrophobic diamond-like carbon (DLC) films on glass surface. The film is formed with plasma treatment duration shorter than 30 s, and water contact angles larger than 90 degrees together with contact angle hysteresis larger than 10 degrees can be achieved. According to Fourier transform infrared spectroscopy and atomic force microscopy analysis, hydrocarbon functional groups are created on the glass substrate, producing coatings with low surface energy (similar to 35 mJ m(-2)) with no modification of the surface roughness. To infer the plasma processes leading to the formation of low energy DLC surfaces, optical emission spectroscopy was used. From the results, a direct relationship between the CH species present in the plasma and the carbon concentration in the hydrophobic layer was found, which suggests that the CH species are the precursors of DLC film growth. Additionally, the plasma gas temperature was measured to be below 350K which highlights the suitability of using AP-DBD to treat thermo-sensitive surfaces. Published by AIP Publishing.

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