4.8 Review

Nanofabrication through molding

期刊

PROGRESS IN MATERIALS SCIENCE
卷 125, 期 -, 页码 -

出版社

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.pmatsci.2021.100891

关键词

Nanomolding; Nanofabrication; Diffusion; Dislocation slip; Single crystal; Viscous flow

资金

  1. National Science Foundation through the Advanced Manufacturing Program [CMMI 1901613]
  2. National Natural Science Foundation of China [12172260, 11632009]
  3. Wuhan Science and Technology Bureau of China [2019010701011390]

向作者/读者索取更多资源

Nanomolding is a versatile top-down fabrication method suitable for a wide range of materials and states of matter. It offers solutions for the fabrication of various nanomaterials for diverse applications and improvements in lithography techniques. Recent advances in nanomolding have transformed nanofabrication by allowing designs to be selected from a wide palette of materials.
Nanomolding usually refers to a top-down fabrication method by which a formable or moldable material is shaped using a mold of nanoscale dimensions. Nanomolding is the underlying mechanism for a wide range of nanofabrication methods including template-based deposition, extrusion, nanoembossing, soft lithography, nanoimprint lithography, thermomechanical nanomolding, and nanoimprinting. Its suitability for nanofabrication in a wide range of materials and states of matter makes it one of the most versatile nanofabrication methods. It offers solutions for the fabrication of a wide range of nanomaterials for applications including catalysts, energy, devices, and a wide range of surface functionalization as well as improvements of lithography techniques. This review discusses the various physical mechanisms underlying the nanomolding process, and how they relate to the specifics of the states of matter and the material classes. Nanofabrication methods will then be categorized based on their underlying mechanism, materials that they can fabricate, and technological characteristics such as scalability, costs, precision, and versatility. This will help the reader navigate the numerous, often very specific, methods of this advanced field, and identify the most appropriate process and state of matter for a specific application. A general discussion on nanomolding follows, from accomplishments to date and the challenges that lie ahead in realizing the many potential nanodevices and structures that researchers have envisioned. Particularly the recent advances of nanomolding have resulted in a paradigm shift of nanofabrication in which the design of nanodevices is no longer limited by material and nanostructured geometries but can be selected from a very wide palette of materials.

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